“AlN/AlScN based Micro Acoustic Metamaterials for Radio Frequency Applications of the Next Generations” Abstract: In the last two decades‚ micro-acoustic resonators (μARs) have played a key role in integrated 1G-to-4G radios‚ providing the technological means to achieve compact radio frequency (RF) filters with low loss and moderate fractional bandwidths (BW<4%). More specifically‚ Aluminum Nitride (AlN) […]

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