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PhD Proposal Review: Scandium-doped Aluminum Nitride for new MEMS technologies Michele Pirro Location: 432 ISEC Zoom Link Meeting ID: 938 0086 0379 https://northeastern.zoom.us/u/abZS2SmtT1 Abstract: The increasing demand for data is pushing the MEMS industry to more performant and area-efficient systems to be used in IOT nodes as sensors and RF-components. In this market, AlN plays […]

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