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MIE Seminar Series Speaker: Professor Dragan Djurdjanovic, The University of Texas at Austin, Recent Advances in Condition Monitoring and Operational Decision-Making in Semiconductor Manufacuring

Abstract Modern semiconductor manufacturing tools are often complex systems of numerous interacting subsystems that operate in multiple physical domains and often follow highly nonlinear distributed dynamics. In such systems, traditional condition monitoring methods, which rely on a direct link between sensor readings and the underlying condition of the system, cannot be used. Rather, one must acknowledge that the available sensor readings are only stochastically related to the condition of the monitored system, which therefore must be probabilistically inferred from the sensors. This talk...

Friday, December 1, 2017 at 10:30am





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